The basic steps in the fabrication of components in MEMS technology. Types of MEMS technology and their applications. Design of inductive sensors. Capacitive sensors. Micro-sensors of pressure, displacement, position. Application of implanted micro-sensors in medicine (ocular implants, implants for recording activity of brain cortex). Examples of realized sensors in MEMS technology. The advantages and disadvantages compared to other technologies. A part of the course is being realized through individual research study in the area of micro-sensors application and technology for their fabrication. . The study research includes the review of bibliography, organization and performance of experiments and statistical data processing, numerical simulation, the writing of papers closely related to scientific and educational area of the doctoral dissertation topic.