Application of MEMS and NEMS in Biomedicine | Faculty of Technical Sciences

Subject: Application of MEMS and NEMS in Biomedicine (17.BMIM1D)

Native organizations units: Department of Power, Electronic and Telecommunication Engineering

Type of studies	Title
Master Academic Studies	Biomedical Engineering (Year: 1, Semester: Winter)

General information:

Category	Professional-applicative
Scientific or art field	Electronics
ECTS	6

Acquiring basic knowledge in the field of microelectromechanical systems and their application in biomedicine engineering.

- ability to understand different technological processes of MEMS and NEMS which are used in biomedicine engineering- ability to design a simple integrated sensor or actuator in MEMS and NEMS technology - Ability to simulate components and circuits in MEMS and NEMS used in biomedicine engineering by 3D electromagnetic siimulators

Introduction. Overview of MEMS and NEMS technological process which are used in biomedicine engineering. Surface micromachining, volume micromachining, LIGA process and nano-print lithography in biomedicine engineering. Application of MEMS and NEMS technologies for realization of passive components. Integrated sensors and actuators in MEMS and NEMS technologies. Realization of MEMS and NEMS microvalves. Application of MEMS and NEMS technologies for realization of 3D microstructures in biomedicine engineering. Software tools for modelling and simulation of MEMS and NEMS components and circuits. Examples of mostly used MEMS i NEMS components in biomedicine ingineering.

Lectures. Auditory exercises. Laboratory exercises. Consultations. Experimental projects.

Authors	Title	Year	Publisher	Language
Lyshevski, S.E.	MEMS and NEMS: Systems, Devices, and Structures	2002	CRC press, Boca Raton	English

Course activity	Pre-examination	Obligations	Number of points
Laboratory exercise defence	Yes	Yes	20.00
Term paper	Yes	Yes	25.00
Lecture attendance	Yes	No	0.00
Homework	Yes	Yes	5.00
Written part of the exam - tasks and theory	No	Yes	50.00