Courses – Fakultet tehničkih nauka u Novom Sadu

Subject: Microsensors and MEMS (17.DE502)

Native organizations units: Department of Power, Electronic and Telecommunication Engineering

Type of studies	Title
Doctoral Academic Studies	Power, Electronic and Telecommunication Engineering (Year: 2, Semester: Winter)

General information:

Category	Scientific-professional
Scientific or art field	Electronics
ECTS	10

To prepare students to do the research in the field of micro-sensors and micro-electric-mechanic systems (MEMS).

- Ability to design integrated pressure sensor - Ability to design inductive and capacitive micro-sensor for different applications - Fabrication capacity of sensors designed in modern microelectronic technology, especially in MEMS technology

The basic steps in the fabrication of components in MEMS technology. Types of MEMS technology and their applications. Design of inductive sensors. Capacitive sensors. Micro-sensors of pressure, displacement, position. Application of implanted micro-sensors in medicine (ocular implants, implants for recording activity of brain cortex). Examples of realized sensors in MEMS technology. The advantages and disadvantages compared to other technologies. A part of the course is being realized through individual research study in the area of micro-sensors application and technology for their fabrication. . The study research includes the review of bibliography, organization and performance of experiments and statistical data processing, numerical simulation, the writing of papers closely related to scientific and educational area of the doctoral dissertation topic.

Lectures. Consultations . Overview of scientific papers. Research study.

Authors	Title	Year	Publisher	Language
Lyshevski, S.E.	MEMS and NEMS: Systems, Devices, and Structures	2002	CRC press, Boca Raton	English
Julian Gardner, Vijay Varadan, Osama Awadelkarim	Microsensors, MEMS and smart devices	2007	John Wiley & Sons Ltd.	English